Band Shifts of Tm2o3 Films Epitaxially Grown on Si Substrates

Ren Wei-Yi
DOI: https://doi.org/10.7498/aps.61.017702
IF: 0.906
2012-01-01
Acta Physica Sinica
Abstract:The single crystalline Tm2O3 films are deposited on Si(001) substrates by molecular beam epitaxy, by using x-ray photoelectron spectroscopy, the valence and the conduction-band shifts of Tm2O3 to Si are obtained to be 3.1 +/- 0.2 eV_and 1.9 +/- 0.3 eV, respectively. The energy gap of Er2O3 is determined to be 6.1 +/- 0.2 eV. The results of the study show that the Tm2O3 could be a promising candidate for high-k gate dielectrics.
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