Abstract:Micro-filters fabricated using integration methods is now the trend for multichannel filters in imaging spectrum systems. Traditional multichannel bandpass filters are mainly fabricated separately by multilayered thin films and then glued together. This approach involves the complexity of precision cutting, dicing, and adhesive bonding; therefore, the possibility of miniaturization is quite limited. In this work, a dual channel bandpass thin film filter for the mid-infrared was fabricated by using the lift-off process. The structure of a 4-cavity Fabray–Perot (F-P) type filter was designed and optimized. The bandpass filter over the range 3.55–3.75 μm with full width at half maximum (FWHM) of 274 nm and the bandpass filter over the range 4.85–4.95 μm with FWHM of 246 nm were obtained with a 4.5 μm joint width. The average transmittance of the filters is more than 83.5% and optical density value of the cutoff is 3. The thickness of 3.55–3.75 μm bandpass filter was measured and the thickness error was analyzed. The results show that the thickness error, especially the thickness error of spacer layers, induces the degradations of peak transmission and bandwidth. This kind of mid-infrared filter has important application in space remote sensing, military, and civil fields.

Integrated optical filter arrays fabricated by using the combinatorial etching technique.

Realization of Integrated Narrow Bandpass Filters in the Infrared Region

Integrated filter array fabricated by using the combinatorial deposition technique

128 Channels of Integrated Filter Array Rapidly Fabricated by Using the Combinatorial Deposition Technique

Selectable-FSR 10-Ghz Granularity WDM Superchannel Filter in a Reconfigurable Photonic Integrated Circuit

Miniaturized Dual-Band Substrate Integrated Waveguide Filter with Controllable Bandwidths

Study on cross-coupled substrate integrated evanescent-mode waveguide filter

3D Heterogenous Integrated Wideband Switchable Bandpass Filter Bank for Millimeter Wave Applications

Design of a Miniaturized Dual-Band Double-Folded Substrate Integrated Waveguide Bandpass Filter with Controllable Bandwidths

Integrated Broadband Filter with Sharp Transition Edges Based on SiN and SiON Composite Waveguide Coupler

Narrow-Band Add-Drop Filter Based on Phase-Modulated Grating-Assisted Contra-Directional Couplers

Design and fabrication of visible/mid-infrared dual-band microfilter array

Two-chamber integrated multichannel narrowband filter prepared by a multistep etching method.

Free-spectral-range-free Filters with Ultrawide Tunability Across the S + C + L Band

Design and Fabrication of an Integrated Dual-Channel Thin-Film Filter for the Mid-Infrared

Photonic Integrated Circuits and Components Using Quantum Well Intermixing

Tunable Optical Thin Film Filter Array Based on the Microstructure Technique

Quickly tunable ultra-narrow filter via a metal film waveguide

Ultra-efficient RF Photonics Filter Based on an AlGaAs-on-insulator Integrated Kerr Frequency Comb Source

Reconfigurable photonic RF filters based on integrated Kerr frequency comb sources

Compact Tunable Photonic Comb Filter on A Silicon Platform