Abstract:Multispectral imagers that capture spatial and spectral information are of growing importance in various fields, particularly in remote sensing and metrology. To enable integrated snapshot multispectral imagers and eliminate the drawbacks of traditional systems, such as bulkiness and slow scanning mechanisms, miniature, broadband multispectral filter arrays with narrow line widths, high transmission, and CMOS compatibility are essential. However, current miniature filter arrays, primarily based on diffraction nanostructures, suffer from limitations such as small working bandwidth, low transmission, poor color purity, and sensitivity to polarization and incident angles. To address these challenges, we present a high-order Fabry-Perot Multispectral Filter Array (MSFA) with selective peak suppression, leveraging subwavelength structures for filter tuning without changing the physical thickness and employing an ultrathin metal layer to exploit high-order resonances, significantly extending the working range and spectral resolution. High color purity across a broad range (400nm-1000nm) is made possible through optical absorption from polysilicon and selective suppression from a platinum layer. The fabricated color filter arrays cover wavelengths from 622nm to 960nm, with Full Width Half Maximum (FWHM) ranging from 13nm to 31nm and average transmissions exceeding 60%. Furthermore, these filters can be downscaled to sizes compatible with modern CMOS imagers, reaching dimensions as small as 1um. The introduction of a resonance combining design further extends the working range (455nm-960nm), aligning with the capabilities of silicon photodetectors. Its adaptability across wavelength ranges and potential for tunable applications hold promise for transformative imaging and display technologies across a wide spectrum.

Design and fabrication of visible/mid-infrared dual-band microfilter array

Patterning of Visible/Infrared Dual-Band Microstrip Filter Arrays for Multispectral Imaging Application

Design and Fabrication of an Integrated Dual-Channel Thin-Film Filter for the Mid-Infrared

Multispectral Filters for MIR Spectral Imaging Applications

Realization of Integrated Narrow Bandpass Filters in the Infrared Region

Design and Fabrication of Infrared Hybrid Refractive/diffractive Optical System for 3-5Μm Band

Miniaturized Dual-Band Substrate Integrated Waveguide Filter with Controllable Bandwidths

Design of a Miniaturized Dual-Band Double-Folded Substrate Integrated Waveguide Bandpass Filter with Controllable Bandwidths

Fabrication and Characterization of Two-Dimensional Optical Low Pass Filter

Decorative near-infrared transmission filters featuring high-efficiency and angular-insensitivity employing 1D photonic crystals

Design of mid-infrared filter array based on plasmonic metal nanodiscs array and its application to on-chip spectrometer

Integrated optical filter arrays fabricated by using the combinatorial etching technique.

Non-polarized and Ultra-Narrow Band Filter in MIR Based on Multilayer Metasurface

Ultrabroadband, high color purity multispectral color filter arrays

Tunable Optical Thin Film Filter Array Based on the Microstructure Technique

Imaging of the Mid-Infrared Focal Plane Array with a Modified Read-Out Circuit.

Development of Visible Multi−Bandpass Filter Based on F−P Structure

Free-spectral-range-free Filters with Ultrawide Tunability Across the S + C + L Band

Contact-interference Hybrid lithography: Toward Scalable Fabrication of cross-scale periodic micro structure and demonstration on infrared micro polarizer array

Concept of A High-Resolution Miniature Spectrometer Using an Integrated Filter Array