Tunable Optical Thin Film Filter Array Based on the Microstructure Technique

Min Chen,Xu Liu,Haifeng Li,Peifu Gu,Jinfa Tang
DOI: https://doi.org/10.1364/oic.2001.wb3
2001-01-01
Abstract:A new micromachined tunable optical filter array on glass in visible range is presented. By finite element analysis, the optical performance is simulated which is influenced by the curved surface of the membrane.
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