Tunable F-P Optical Filter Based on Micro-Cavity Structure

M Chen,X Liu,HF Li
DOI: https://doi.org/10.1117/12.444670
2001-01-01
Abstract:Tunable F-P optical thin film filter on glass was built using thin film coating and RIE technology. Photoresist was used as the sacrificial layer and later removed by dry etching.
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