Realization of Integrated Narrow Bandpass Filters in the Infrared Region

Shao-Wei Wang,Dingquan Liu,Bin Lin,Xiaoshuang Chen,Zhifeng Li,Yan Shi,Wei Wang,Wei Lu
DOI: https://doi.org/10.1023/b:ijim.0000047457.40979.6e
2004-01-01
International Journal of Infrared and Millimeter Waves
Abstract:We demonstrated a high-efficiency technique for the integration of narrow bandpass filters (NBPFs). A filter array integrated with 16 filters on a single substrate has been fabricated by only twice depositing processes. The bandpass of the filters can be tuned widely and range from 2.295 to 2.967 μm in this case. The relative full width at half maximum (FWHM) δλ/λ of each filter is less than 0.7%. And the intensity of the bandpass is up to 41.3%.
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