128 Channels of Integrated Filter Array Rapidly Fabricated by Using the Combinatorial Deposition Technique

S.-W. Wang,M. Li,C.-S. Xia,H.-Q. Wang,X.-S. Chen,W. Lu
DOI: https://doi.org/10.1007/s00340-007-2726-3
2007-01-01
Applied Physics B
Abstract:A combinatorial deposition technique is developed to fabricate integrated narrow bandpass filters (NBPFs) on a single substrate. It is highly efficient for the fabrication of integrated filter arrays in optical regions. An array integrated with 128 NBPFs has been fabricated by using the technique with only a nine-step deposition process. The pass-bands of the filters distribute almost linearly in the range of 722.0-880.0 nm. Their relative bandwidth is smaller than 0.44%.
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