Two-chamber integrated multichannel narrowband filter prepared by a multistep etching method.

Hongfei Jiao,Yonggang Wu,Guoxun Tian,Shaowei Wang,Hong Cao,Li Zhang,Lianxiao Fu
DOI: https://doi.org/10.1364/AO.46.000867
IF: 1.9
2007-01-01
Applied Optics
Abstract:A new, to the best of our knowledge, method, which combines the multistep ion-etching method with a traditional narrowband filter coating technique, is developed to prepare a two-chamber integrated multichannel filter. The influence of film deposition and etch technique on the shape and height of the narrow transmittance peaks is analyzed. A 32-channel narrowband integrated filter is fabricated with a homemade ion-etching machine and a coating machine. Every channel is distinctly separated and the FWHM is 1% of its central wavelength. The feasibility of the technique will be useful in the fabrication of a higher integrated multichannel narrowband filter.
What problem does this paper attempt to address?