Two Methods in the Measurement of Surface Roughness

LI Gang,WANG Rui-bin,LI Hui-qin
DOI: https://doi.org/10.3969/j.issn.1006-7167.2006.11.010
2006-01-01
Abstract:Surface roughness is a very important parameter to value the surface quality of products.Two methods including surface profiler and atomic force microscopy(AFM) were adopted respectively to measure the roughness of BST film and a comparison of distinctive features of the above-mentioned methods in surface roughness measurement was presented.
What problem does this paper attempt to address?