Abstract:Poly(methylmethacrylate) (PMMA) has been widely used in the fields of optical instruments, aviation and auto industry, construction industry, advertising and decoration industry due to its optical transparency, low cost, low toxicity, and less fragile property. Recently it has been exploited to fabricate microfluidic chips. Region-selective metallization of PMMA surfaces are frequently required to improve the surface properties of PMMA and to integrate micro metal devices in PMMA microfluidic chips. This article presents our recent study on region-selective metalization of PMMA by means of UV/O-3-based surface modification in combination of region-selective electroless plating. Deep UV-lights, ozone, and deep UV-lights in cooperation with ozone were compared with respect to the efficiency of hydrophilization of the PMMA surface. It was observed with water contact angle measurements that only synchronized deep UV and ozone treatment can turn the PMMA surface from hydrophobic to hydrophilic effectively. Attenuated total reflection fourier transform infrared spectra revealed that polar moieties such as carboxyl groups were generated on the UV/O-3 treated areas. These polar moieties served as the anchors for further chemical reactions including amination of the carboxyl groups with ethylenediamine, adsorption of chloraurate anion onto the amine groups, and reduction of the Au(III) in the chloraurate anion to Au(0) by borohydride. These reactions led to the formation of the catalysis center of gold nano-particles on the UV-irradiated areas, which is indispensable for region-selective electroless plating. After optimization of the experimental conditions, a novel method for preparation of micro metal devices on PMMA surface has been established. With the printed poly(ethylene terephthalate) (PET) film serving as the primary photo mask, the achievable resolution of the prepared micro metal patterns was 50 mu m or less. The deposited metal films adhered to the PMMA surface so strongly that they could hardly be tore off with adhesive tapes. Micro gold electrodes, micro gold electric heaters, micro copper electrodes, etc. were demonstrated to be prepared on PMMA surfaces, and their physical and electro-chemical properties were characterized.

Deep Reactive Ion Etching of Commercial Pmma in O-2/Chf3, and O-2/Ar-Based Discharges

Deep Reactive Ion Etching of Pmma

Study on Deep Reactive Ion Etching of Commerical Polymethlmethacrylate Film

Microstructures of PMMA Sheet Fabricated by RIE

Pmma Deep Etching By O2rie

Pmma Microstructures Deep Etch Process

High Aspect Ratio Pmma Micro-Structures Fabricated by Rie

&Lt;title>pmma Microstructure Deep-Etch Process</title>

Plasma Treatment of Polymethyl Methacrylate to Improve Surface Hydrophilicity and Antifouling Performance

Surface Roughening of Polystyrene and Poly(methyl methacrylate) in Ar/O2 Plasma Etching

Effect of Ion Etching on Polymethyl Methacrylate Surface

Region-selective Metalization of Poly(methylmethacrylate) Surface Based on UV/ozone Surface Modification

Reactive Ion Etching of HfO2 Films

Vertical and Smooth, Etching of Inp by Cl-2/Ch4/Ar Inductively Coupled Plasma at Room Temperature

Reactive Ion Beam Etching of Hfo2 Film Using Ar/Chf3 Gas Chemistries

Enhanced Surface Flashover Strength in Vacuum of Polymethylmethacrylate by Surface Modification Using Atmospheric-Pressure Dielectric Barrier Discharge

Electron dynamics and SiO2 etching profile evolution in capacitive Ar/CHF3 discharges driven by sawtooth-tailored voltage waveforms

Reactive ion etching of plasma enhanced chemical vapor deposition amorphous silicon and silicon nitride: Feeding gas effects

Surface Modification of Polymethyl-Methacrylate Using Atmospheric Pressure Argon Plasma Jets to Improve Surface Flashover Performance in Vacuum

Deep Reactive Ion Etching of Z-Cut Alpha Quartz for MEMS Resonant Devices Fabrication

Highly selective dry etching of polystyrene-poly(methyl methacrylate) block copolymer by gas pulsing carbon monoxide-based plasmas