Analysis of Piezoelectric-solid-liquid Coupling Characteristics of Micro Nebulizer

Ming-wei YANG,Zhao-ying ZHOU

DOI: https://doi.org/10.3969/j.issn.1004-2474.2009.06.017

2009-01-01

Abstract:Aimed at the problem of multiple-domain coupling of piezoelectric micro nebulizer,a typical piezoelectric-solid-liquid coupling model was built up.A FEM model was presented for this piezoelectric liquid-structure coupling system,focusing on the thickness of liquid impact on the coupling of the system.The results showed that when the piezoelectric actuator was vibrated,because of the coupling of the liquid layer and solid,nozzle-film also was generated vibration at the same time,and the phase relationship occurred to them;the coupling,resonant frequency of the system and the phase difference between back film and nozzle film were affected greatly by the thickness of liquid;and existing the best design parameters,when the thickness of liquid layer was 500 μm.The resonant frequency of the largest was about 38 kHz,which could have a greater sound pressure wave,as well as the larger flow rate.Therefore,it was incomprehensive only to consider the amplitude of piezoelectric vibration,we must also consider the nozzle film vibration,as well as the phase between back film and the nozzle film,and this can provide guidance for the optimal design of micro nebulizer.