MEMS-based piezoelectric array microjet

Songmei Yuan,Zhaoying Zhou,Guohui Wang,Changgeng Liu
DOI: https://doi.org/10.1016/S0167-9317(02)00997-8
IF: 2.3
2003-01-01
Microelectronic Engineering
Abstract:As an important non-invasive drug delivery method, aerosol therapy has become an attractive focus in the fields of both pharmacy and medical instruments and will be widely used in the future. Atomizing drug delivery system can be classified into jet nebulizer, ultrasonic ejector, and MEMS-based microjet. According to different driving ways, MEMS-based microjet mainly adopts resistance-heated, electrostatic, ultrasonic, and piezoelectric mechanisms. In this paper, a new type of piezoelectric micro-array jet for medical use is presented. The device consists of a fluid chamber, which is formed by a piezoelectric transducer bonded to a silicon wafer with nozzles. Inside the fluid chamber a continuous pressure wave generated by the piezoelectric transducer propagates towards the nozzles and squeezes the liquid out. The pressure generated by piezoelectric disk is theoretically analyzed. The vibration mode at the first order resonant frequency of the piezoelectric transducer is analyzed and tested. The fabrication and bonding techniques of silicon wafer are discussed. The droplet diameter and velocity that are important parameters of the microjet are tested. As a result, the droplets have a narrow diameter distribution and velocity distribution.
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