Important Theory of Array Microjet Based on MEMS

SM Yuan,ZY Zhou,GH Wang,CG Liu

DOI: https://doi.org/10.1117/12.483171

2002-01-01

Abstract:As a non-invasive drug delivery method, atomizing drug delivery method has become an investigating hotspot in the fields of pharmacy and medical instruments, and has widely potential applications in the future. It is used for delivery of antibiotic, antiviral drug, anti hypertension drug, angina drug, and other drugs including peptide or protein ingredients, even bacterin and biologic, synthetic. This paper proposes a piezoelectric array microjet based on MEMS, which is formed by piezoelectric transducer bonded to a silicon chip with nozzles. Droplet diameter is one of the key parameters of the microjet, and has an important effect on detailed deposit position. The processing drag, surface tension and inertia force must be overcome through continuous pressing wave produced by the piezoelectric transducer, and droplet can be squeezed out of the cavity. The theoretical problems on the characteristics of the microjet have been discussed. Conclusions are useful for the design of the microjet.