Piezoelectrically Actuated Array Microjet for Biomedical Purpose

Xu Qiang,Zhou Zhaoying,Zhu Junhua,Feng Yanying,Lin Dong,Du Guibin

2007-01-01

Indian Journal of Pure & Applied Physics

Abstract:This paper presents a micromachining-based piezoelectrically actuated array microjet for biomedical purposes such as inhalation drug therapy (IDT) and drug microencapsulation. The microjet consists of a reservoir and a fluid chamber, which is formed by a piezoelectric transducer bonded to a silicon chip with numerous micro nozzles. Inside the fluid chamber, a continuous pressure wave generated by the piezoelectric transducer propagates towards the silicon chip and squeezes the liquid out through the nozzles. The pressure wave in fluid chamber is numerically simulated using finite elements method to give a reference for nozzles arrangement. Diameter and velocity measurements of droplets, temperature estimations on working device and a preliminary animal experiment of IDT are done to characterize the microjet. As a result, the microjet could be a promising tool in biomedicine field.