Modal Analysis of Liquid-solid Coupling System of Flat-walled Valveless Micropumps

Li Jun,Ying Ji,Shen Xueming,Xu Liang
2009-01-01
Abstract:To investigate the vibration characteristics of valveless micropumps,the liquid-solid coupling mode of micropump membrane was extracted by the wet modal method ignoring the influence of damping.A finite element model for liquid-solid coupling system was built with software ANSYS,and the wet mode of the membrane was ex-tracted using unsymmetric method of structural modal analysis.The effects of geometric parameters and fluid pres-sure on the membrane wet mode were investigated.It shows that the frequency of the wet mode is much lower than that of the dry mode,but the mode shapes are similar.The higher the micropump chamber,the greater the influ-ence on the wet mode in a certain range.The fluid pressure of the pump chamber has little effect on the wet mode.
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