Coupled Analysis on the Piezoelectric-Elastic Micro Actuator

Li Liwei,Zhu Rong,Zhou Zhaoying,Ren Jianxing
DOI: https://doi.org/10.3969/j.issn.1671-4776.2008.09.009
2008-01-01
Abstract:A coupled structure having an elastic vibrating film bonded with a PZT layer is mainly employed as the actuator in MEMS devices.It is a key point of actuating and controlling microfluid to grasp the coupled mechanism of piezoelectric-elastic structure.The displacement field models for such piezoelectric-silicon actuator were established according to the Kirchhoff assumption for thin plates and the piezoelectric effect.Under the boundary condition of clamped edge,the natural frequency and mode shape of such coupled structure were achieved by means of Rayleigh-Ritz energy method.An experimental investigation was carried out to verify the applicability of the analytical model.A good agreement between the theorical and experimental results was observed.The results show that the model can predict natural frequencies and modes shapes of these kinds of coupled structure or actuator accurately.The investigation provides theoretical and experimental foundation for actuating and controlling of micro fluid.
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