Formation and Evolution of Erbium Silicide Nanowires on Vicinal and Flat Si(001)

W Zhou,Y Zhu,T Ji,XY Hou,Q Cai
DOI: https://doi.org/10.1088/0957-4484/17/3/040
IF: 3.5
2006-01-01
Nanotechnology
Abstract:Erbium deposited on vicinal Si(001) at room temperature and postannealed at 630 degrees C is observed to form self-assembled erbium silicide nanowires with a single orientation. In the same growth conditions, the nanowires formed on the flat Si(001) surface possess two orthogonal orientations. The growths and evolutions of nanowires on vicinal and flat Si(001) are studied by scanning tunnelling microscopy and compared with each other. The nanowires on both vicinal and flat surfaces undergo a ripening process at the late growth stage, which is considered to be affected by coalescence and strain.
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