Epitaxial Growth of Ordered In-Plane Si and Ge Nanowires on Si (001)

Jian-Huan Wang,Ting Wang,Jian-Jun Zhang
DOI: https://doi.org/10.3390/nano11030788
IF: 5.3
2021-03-19
Nanomaterials
Abstract:Controllable growth of wafer-scale in-plane nanowires (NWs) is a prerequisite for achieving addressable and scalable NW-based quantum devices. Here, by introducing molecular beam epitaxy on patterned Si structures, we demonstrate the wafer-scale epitaxial growth of site-controlled in-plane Si, SiGe, and Ge/Si core/shell NW arrays on Si (001) substrate. The epitaxially grown Si, SiGe, and Ge/Si core/shell NW are highly homogeneous with well-defined facets. Suspended Si NWs with four {111} facets and a side width of about 25 nm are observed. Characterizations including high resolution transmission electron microscopy (HRTEM) confirm the high quality of these epitaxial NWs.
materials science, multidisciplinary,physics, applied,nanoscience & nanotechnology,chemistry
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