Abstract:For a long time, the forming quality of large area diffraction gratings is restricted by the one-time coating quality and uniformity of large thickness and large area aluminum films. Large thickness coatings, low accuracy of large depth grooves and diamond tool wear problems were the main reasons for the failure of the test to inscribe large area diffraction gratings. Therefore, the use of layered coating process can effectively ensure the uniformity and consistency of large-area and large-thickness grating blanks coated with aluminum film, and improve the high precision of large depth diffraction grating slot type. In order to reveal the mechanism of the groove-forming process of multilayer aluminum films, the microstructure and mechanical properties of different aluminum films were observed. In this article, the removal behavior and mechanism of nanomechanically scratched multilayer aluminum film materials are investigated using a molecular dynamics approach, and the characteristics of multilayer aluminum films scratched into grooves are analyzed in terms of surface morphology, scratching force, structural evolution, dislocation distribution, von Mises stress and shear strain. The results indicate that in the scratching simulation process, multilayer aluminum film has a higher number of removed atoms and a larger atomic displacement compared to single layer aluminum film, which is conducive to precise shape control of the groove. The average tangential force and normal force of multilayer aluminum film show a decreasing trend compared to single layer aluminum film, which helps to scratch grooves and reduce tool wear. The total length of the dislocation lines of the multilayer aluminum film is large, and the distribution area is large, which improves the precision of scratching the grooves. Therefore, an appropriate increase in the number of aluminum film layers has a precise control effect on the groove shape. This study has certain reference significance for analyzing the complex grooving deformation law of grating aluminum film, improving the diffraction efficiency of grating aluminum film, and further improving the manufacturing process of grating aluminum film.

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