Molecular Dynamics Simulation of Form Measurement Process of Soft Materials Using Atomic Force Microscope

Yindi Cai,Yuan-Liu Chen,Yuki Shimizu,So Ito,Wei Gao
DOI: https://doi.org/10.1109/nems.2016.7758221
2016-01-01
Abstract:Molecular dynamics simulations of contact mode form measurement process on a soft substrate with a special surface profile using a diamond AFM tip are preformed to investigate the contact behavior and the surface profile damages or distortions of the measured substrate. The process of contact mode imaging of the AFM can be treated as the process of nano-scratching. The simulation-predicted interaction force, including scratching force and normal force, characterizes the saw-tooth pattern, which is referred to as atomic stick-slips. The shape of measured substrate surface, especially the surface underneath the AFM tip, is distorted by the interaction force between the AFM tip and the substrate surface.
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