Abstract:Nanocrystalline diamond films were deposited on Co-cemented tungsten carbides using bias-enhanced hot filament CVD system with a mixture of acetone, H-2 and Ar as the reactant gas. The effect of Ar concentration on the grain size of diamond films and diamond orientation was investigated. Nanocrystalline diamond films were characterized with field emission scan electron microscopy (FE-SEM), Atomic force microscopy (AFM), Raman spectroscopy and X-ray diffraction spectroscopy (XRD). Rockwell C indentation tests were conducted to evaluate the adhesion between diamond films and the substrates. The results demonstrated that when the At concentration was 90%, the diamond films exhibited rounded fine grains with an average grain size of approximately 60-80 nm. The Raman spectra showed broadened carbon peaks at 1350 cm(-1) and 1580 cm(-1) assigned to D and G bands and an intense broad Raman band near 1140 cm(-1) attributed to traps-polyacetylene, which confirmed the presence of the nanocrystalline diamond phase. The full width at half maximum of the < 111 > diamond peak (0.8 degrees) was far broader than that of conventional diamond film (0.28 degrees-0.3 degrees). The Ra and RMS surface roughness of the nanocrystalline diamond film were measured to be approximately 202 nm and 280 nm with 4 mm scanning length, respectively. The Ar concentration in the reactant gases played an important role in the control of grain size and surface roughness of the diamond films. Nanocrystalline diamond-coated cemented tungsten carbides with very smooth surface have excellent characteristics, which made them a promising material for the development of high performance cutting tools and wear resistance components. (c) 2006 Elsevier B.V. All rights reserved.

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