5.8-kV Implantation-Free 4H-SiC BJT With Multiple-Shallow-Trench Junction Termination Extension

Arash Salemi,H. Elahipanah,M. Östling,C. Zetterling
DOI: https://doi.org/10.1109/LED.2014.2386317
IF: 4.8157
IEEE Electron Device Letters
Abstract:Implantation-free 4H-SiC bipolar junction transistors with multiple-shallow-trench junction termination extension have been fabricated. The maximum current gain of 40 at a current density of 370 A/cm<sup>2</sup> is obtained for the device with an active area of 0.065 mm<sup>2</sup>. A maximum open-base breakdown voltage (BV) of 5.85 kV is measured, which is 93% of the theoretical BV. A specific ON-resistance (R<sub>ON</sub>) of 28 mΩ·cm<sup>2</sup> was obtained.
Physics,Engineering,Materials Science
What problem does this paper attempt to address?