Hybrid integrated Si3N4 external cavity laser with high power and narrow linewidth

Chen Chen,Fang Wei,Xiuyou Han,Qingshuai Su,Haoyang Pi,Guofeng Xin,Huimin Wu,Anton Stroganov,Yanguang Sun,Weijie Ren,Xiao Chen,Qing Ye,Haiwen Cai,Weibiao Chen
DOI: https://doi.org/10.1364/OE.487850
2023-07-31
Abstract:We have designed and fabricated a hybrid integrated laser source with full C-band wavelength tunability and high-power output. The external cavity laser is composed of a gain chip and a dual micro-ring narrowband filter integrated on the silicon nitride photonic chip to achieve a wavelength tuning range of 55 nm and a SMSR higher than 50 dB. Through the integration of the semiconductor optical amplifier in the miniaturized package, the laser exhibits an output power of 220 mW and linewidth narrower than 8 kHz over the full C-band. Such a high-power, narrow-linewidth laser diode with a compact and low-cost design could be applied whenever coherence and interferometric resolutions are needed, such as silicon optical coherent transceiver module for space laser communication, light detection and ranging (LiDAR).
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