Effect of High-k Dielectric Layer on 1/f Noise Behavior in Graphene Field-Effect Transistors

Yifei Wang,Vinh X. Ho,Zachary. N. Henschel,Michael P. Cooney,Nguyen Q. Vinh
DOI: https://doi.org/10.48550/arXiv.2103.14812
2021-03-27
Materials Science
Abstract:We report the 1/f noise characteristics at low-frequency in graphene field-effect transistors that utilized a high-k dielectric tantalum oxide encapsulated layer (a few nanometers thick) placed by atomic layer deposition on Si3N4. A low-noise level of ~ 2.2 x 10^(-10) Hz-1 has been obtained at f = 10 Hz. The origin and physical mechanism of the noise can be interpreted by the McWhorter context, where fluctuations in the carrier number contribute dominantly to the low-frequency noise. Optimizing fabrication processes reduced the number of charged impurities in the graphene field-effect transistors. The study has provided insights into the underlying physical mechanisms of the noise at low-frequency for reducing the noise in graphene-based devices.
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