Formation of a p-n junction on the GaAs-surface by an Ar+ ion beam

V.M. Mikoushkin,V.V. Bryzgalov,S.Yu. Nikonov,A.P. Solonitsyna,D.E. Marchenko
DOI: https://doi.org/10.48550/arXiv.1612.06798
2016-12-21
Abstract:The core-level and valence band electronic structure of the well-defined near-surface layer of n-GaAs (100) has been studied by synchrotron-based high-resolution photoelectron spectroscopy before and after modification of the layer by an Ar+ ion beam in the 1.5 - 2.5 keV energy range. Conversion of the conductivity type from n into p has been revealed in the irradiated layer several nm thick. The effect manifests itself in shifts of the core-levels and valence band edge by the value comparable to the bandgap width. Transformation on the conductivity type has been assumed to be caused by Ga-antisite point defects generated by ion bombardment. The possibility of local formation of a p-n nanojunction within the ion-beam spot has been shown.
Materials Science
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