Epitaxial Growth of VO$_{2}$ by Periodic Annealing

J. W. Tashman,J. H. Lee,H. Paik,J. A. Moyer,R. Misra,J. A. Mundy,T. Spila,T. A. Merz,J. Schubert,D. A. Muller,P. Schiffer,D. G. Schlom
DOI: https://doi.org/10.1063/1.4864404
2014-01-28
Abstract:We report the growth of ultrathin VO$_{2}$ films on rutile TiO$_{2}$ (001) substrates via reactive molecular-beam epitaxy. The films were formed by the cyclical deposition of amorphous vanadium and its subsequent oxidation and transformation to VO$_{2}$ via solid-phase epitaxy. Significant metal-insulator transitions were observed in films as thin as 2.3 nm, where a resistance change {\Delta}R/R of 25 was measured. Low angle annular dark field scanning transmission electron microscopy was used in conjunction with electron energy loss spectroscopy to study the film/substrate interface and revealed the vanadium to be tetravalent and the titanium interdiffusion to be limited to 1.6 nm.
Materials Science
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