Research on Short Circuit Robustness of Corrugated p-body 4H-SiC MOSFET

X. Dai,Fang Qi,Xiuxiu Gao,Chengzhan Li
DOI: https://doi.org/10.1109/ICSICT49897.2020.9278241
2020-11-03
Abstract:Corrugated p-body structure introduced into 1200V 4H-SiC power MOSFET can improve the short-circuit time <tex>$\mathrm{t}_{\mathrm{SC}}$</tex>, the shape and doping distribution of p-body region were optimized by Sentaurus. The critical parameters such as specific on-resistance R<inf>on</inf>, <inf>sp,</inf>short circuit time <tex>$\mathrm{t}_{\mathrm{SC}}$</tex>, breakdown voltage BV, gate oxide maximum electric field <tex>$\mathrm{E}_{\mathrm{MOX}}$</tex>, short circuit energy <tex>$\mathrm{E}_{\mathrm{SC}}$</tex>, on-state voltage <tex>$\mathrm{V}_{\mathrm{DS},\mathrm{on}}$</tex> SiC semiconductor <tex>$\mathrm{T}_{\mathrm{s}}$</tex> and gate oxide temperature <tex>$\mathrm{T}_{\mathrm{OX}}$</tex> under T=25°Cand T=175°Cand mechanism of the device are investigated and presented. The results from numeric simulation prove the device parameters of the proposed structure to be up to target demand.
Physics,Engineering,Materials Science
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