Postgrowth wavelength tuning of optoelectronic devices by ion implantation induced quantum well intermixing

L. Fu,H. Tan,C. Jagadish,L. Dao,M. Gal,Ning Li,Wei Lu,S. Shen
DOI: https://doi.org/10.1109/COMMAD.2000.1022959
2000-12-06
Abstract:As one of the postgrowth band gap engineering technique, proton implantation induced quantum well intermixing has been used to tune the wavelength of two different optoelectronic devices, the quantum well laser and quantum well infrared photodetector. Large wavelength shifts have been obtained for both devices after implantation and rapid thermal annealing, without significant degradation of performance.
Materials Science
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