Vertical Electric Field-Induced Abnormal Capacitance–Voltage Electrical Characteristics in a-InGaZnO TFTs

Chuan-Wei Kuo,Ting-Chang Chang,Hong-Chih Chen,Yu-Ching Tsao,Jian-Jie Chen,Kuan-Ju Zhou,Wen-Chi Wu,Hsin-Chieh Li,Chih-Chih Lin,Yong-Ci Zhang,Tsung-Ming Tsai,Jen-Wei Huang
DOI: https://doi.org/10.1109/ted.2021.3095828
IF: 3.1
2021-09-01
IEEE Transactions on Electron Devices
Abstract:This study investigates an abnormal degradation induced in a moist environment. Although devices maintain optimal performance under bias stress operation in a vacuum, an abnormal hump is observed in capacitance–voltage (${C}$ –${V}$ ) electrical characteristics under negative bias stress (NBS) operation in a moist environment. Electrolysis of the H2O model is proposed to explain the degradation. An asymmetric stress condition, with ${V} _{\text {GD}} = {0}$ V, is designed to confirm that a vertical electric field causes the electrolysis of H2O, which is the reason for the hump phenomenon in the ${C}$ –${V}$ curve. Moreover, COMSOL simulation and ${C}$ –${V}$ measurement of the source and drain parasitic capacitances are utilized to clarify the precise degradation position and support the mechanism. The results from electrical measurement suggest that a vertical electric field can cause instability in a moist environment.
engineering, electrical & electronic,physics, applied
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