Spatial mapping of photovoltage and light-induced displacement of on-chip coupled piezo/photodiodes by Kelvin probe force microscopy under modulated illumination

Zeinab Eftekhari,Nasim Rezaei,Hidde Stokkel,Jian-Yao Zheng,Andrea Cerreta,Ilka Hermes,Minh Nguyen,Guus Rijnders,Rebecca Saive
DOI: https://doi.org/10.3762/bjnano.14.87
IF: 3.1
2023-11-06
Beilstein Journal of Nanotechnology
Abstract:In this work, a silicon photodiode integrated with a piezoelectric membrane is studied by Kelvin probe force microscopy (KPFM) under modulated illumination. Time-dependent KPFM enables simultaneous quantification of the surface photovoltage generated by the photodiode as well as the resulting mechanical oscillation of the piezoelectric membrane with vertical atomic resolution in real-time. This technique offers the opportunity to measure concurrently the optoelectronic and mechanical response of the device at the nanoscale. Furthermore, time-dependent atomic force microscopy (AFM) was employed to spatially map voltage-induced oscillation of various sizes of piezoelectric membranes without the photodiode to investigate their position- and size-dependent displacement.
materials science, multidisciplinary,physics, applied,nanoscience & nanotechnology
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