Etching uniformity study of mask electrolyte jet machining based on mass transfer coefficient: 3D simulation and experimental validation

Mingxin Yu,Liqun Du,Fenglai Wang,Aoqi Li,Zhongmin Wang,Haohao Cheng
DOI: https://doi.org/10.1016/j.jmapro.2024.04.003
IF: 5.684
2024-04-20
Journal of Manufacturing Processes
Abstract:Mask electrolyte jet machining (MEJM) is a highly promising electrochemical machining method for processing metal surface microstructures due to its high precision and throughput. However, the mechanism by which MEJM improves the uniformity of microstructure arrays is not yet fully understood, and there is a lack of quantitative analysis regarding the mass transfer inside the microstructures. This paper utilizes 3D simulations and experiments to analyze the machining mechanism of MEJM and to quantitatively assess the mass transfer inside microstructures. The simulation results show that MEJM can increase the local current density, and combined with cathode movement can make the electric field distribution uniform. Additionally, the jet facilitates the rapid discharge of electrolysis products and oxygen bubbles inside the micro pits. Compared to the traditional through-mask electrochemical micromachining (TMEMM), the mass transfer coefficient inside the micro pits was improved in MEJM. The mechanism of cathode moving speed and jet velocity for uniformity is analyzed with theoretical studies. In addition, uniform microprotrusions were prepared using the MEJM method. The results demonstrate that MEJM is a high-precision technique for the batch fabrication of surface microstructures.
engineering, manufacturing
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