Jet Electroforming of High-Aspect-Ratio Microcomponents by Periodically Lifting a Necked-Entrance Through-Mask

Yasai Zhang,Pingmei Ming,Xinmin Zhang,Xinchao Li,Lunxu Li,Zheng Yang
DOI: https://doi.org/10.3390/mi15060753
IF: 3.4
2024-06-04
Micromachines
Abstract:High-aspect-ratio micro- and mesoscale metallic components (HAR-MMMCs) can play some unique roles in quite a few application fields, but their cost-efficient fabrication is significantly difficult to accomplish. To address this issue, this study proposes a necked-entrance through-mask (NTM) periodically lifting electroforming technology with an impinging jet electrolyte supply. The effects of the size of the necked entrance of the through-mask and the jet speed of the electrolyte on electrodeposition behaviors, including the thickness distribution of the growing top surface, deposition defect formation, geometrical accuracy, and electrodeposition rate, are investigated numerically and experimentally. Ensuring an appropriate size of the necked entrance can effectively improve the uniformity of deposition thickness, while higher electrolyte flow velocities help enhance the density of the components under higher current densities, reducing the formation of deposition defects. It was shown that several precision HAR-MMMCs with an AR of 3.65 and a surface roughness (Ra) of down to 36 nm can be achieved simultaneously with a relatively high deposition rate of 3.6 μm/min and thickness variation as low as 1.4%. Due to the high current density and excellent mass transfer effects in the electroforming conditions, the successful electroforming of components with a Vickers microhardness of up to 520.5 HV was achieved. Mesoscale precision columns with circular and Y-shaped cross-sections were fabricated by using this modified through-mask movable electroforming process. The proposed NTM periodic lifting electroforming method is promisingly advantageous in fabricating precision HAR-MMMCs cost-efficiently.
chemistry, analytical,nanoscience & nanotechnology,instruments & instrumentation,physics, applied
What problem does this paper attempt to address?
This paper attempts to solve the problem of efficient and low - cost manufacturing of high - aspect - ratio micro - and meso - scale metal components (HAR - MMMCs). Specifically, the paper proposes the jet electroforming technology by periodically lifting the through - mask with a necked - in entrance (NTM) to improve the manufacturing process of these components. ### Problem Background High - aspect - ratio micro - and meso - scale metal components play a unique role in multiple application fields, such as micro - coils in electromagnetic actuators, tapered micro - pillars in microfluidic devices, and micro - electrodes in neural tissue - penetrating operations. However, the efficient and low - cost manufacturing of these components has always been a difficult problem. Traditional manufacturing methods such as electrical discharge machining, mechanical micro - drilling and micro - milling, laser beam machining, electron beam machining, and metal additive manufacturing are either difficult to mass - produce high - aspect - ratio micro - components or difficult to simultaneously achieve the required machining accuracy and material properties. ### Method Proposed in the Paper To solve these problems, this research proposes a new electroforming technology - jet electroforming by periodically lifting the through - mask with a necked - in entrance (NTM). This method combines the advantages of jet electroforming and moving - mask electroforming and aims to improve the deposition rate and forming accuracy. The main innovation points include: 1. **Necked - in Entrance Design**: Install a necked - in structure at the entrance of each through - mask cavity to reduce edge effects and enhance the uniformity of current density distribution. 2. **High - speed Jetting of Electrolyte**: Use high - speed jetting of electrolyte to accelerate mass transfer, thereby increasing the deposition rate. 3. **Periodic Lifting**: By periodically lifting the NTM, ensure a high current density and uniform mass transfer during the deposition process. ### Research Content The paper studies the following aspects in detail: - The influence of the necked - in entrance size and electrolyte jetting speed on the electrodeposition behavior, including the top - surface thickness distribution, deposition defect formation, geometric accuracy, and electrodeposition rate. - Through numerical simulation and experimental verification, evaluate the electrodeposition behavior, surface morphology, and dimensional accuracy under different parameters. Research shows that by optimizing the design and operating parameters of the NTM, the deposition rate and forming accuracy can be significantly improved, and finally, precision HAR - MMMCs with a high aspect ratio (AR = 3.65), low surface roughness (Ra = 36 nm), and a high deposition rate (3.6 µm/min) can be successfully manufactured. ### Conclusion The NTM periodic - lifting electroforming method proposed in this research shows significant advantages in the efficient and low - cost manufacturing of high - aspect - ratio micro - and meso - scale metal components and is expected to become one of the key technologies in the future micro - manufacturing field.