Abstract:Amorphous alloy (AA) is a high-performance metal material generally with significantly excellent mechanical and corrosion resistance properties and thus is considered as a desirable material selection for micro-scale articles. However, the microfabrication of AA still faces a variety of technical challenges mainly because the materials are too hard to process and easily lose their original properties, although at moderately high temperatures. In this study, jet-electrolyte electrochemical machining (Jet-ECM) was proposed to microfabricate the Zr-based AA because it is a low-temperature material-removal process based on the anode dissolution mechanism. The electrochemical dissolution characteristics and material removal mechanism of AA were investigated, and then the optimal process parameters were achieved based on the evaluation of the surface morphologies, surface roughness, geometrical profile, and machining accuracy of the machined micro-dimples. Finally, the feasibility was further studied by using Jet-ECM to fabricate arrayed micro-dimples using the optimized parameters. It was found that Jet-ECM can successfully microfabricate mirror-like surface AA arrayed precision micro-dimples with significantly high dimensional accuracy and geometrical consistency. Jet-ECM is a promisingly advantageous microfabrication process for the hard-to-machine AA.

What problem does this paper attempt to address?

The paper primarily explores the technical challenges and solutions for manufacturing micro-sized amorphous alloy structures with mirror-like surface precision using the Jet Electrochemical Machining (Jet-ECM) method. ### Problems the Paper Attempts to Solve 1. **Micro-manufacturing challenges of Amorphous Alloy (AA)**: Amorphous alloys are considered ideal material choices for micro devices due to their excellent mechanical properties and corrosion resistance. However, their high hardness and tendency to lose original properties at moderate temperatures pose difficulties for micro-manufacturing. 2. **Developing micro-manufacturing processes suitable for amorphous alloys**: Given the limitations of traditional mechanical machining, laser beam machining, and other methods in processing amorphous alloys, the paper proposes a new method based on Jet Electrochemical Machining (Jet-ECM) and investigates its feasibility for manufacturing amorphous alloys. ### Main Research Content - **Materials and Methods**: Zr-based amorphous alloy was used as the experimental material, and micro-pit experiments were conducted using Jet Electrochemical Machining (Jet-ECM). The electrochemical dissolution characteristics of amorphous alloys under different electrolyte solutions (such as 1 M NaCl, 1 M HCl, 0.5 M H2SO4, and 1 M NaNO3) were studied, and the impact of these characteristics on micro-manufacturing was analyzed. - **Results and Discussion**: - Through Electrochemical Impedance Spectroscopy (EIS) analysis, the corrosion characteristics of amorphous alloys in different electrolytes were determined. It was found that electrolytes containing Cl- (such as NaCl and HCl solutions) caused numerous medium-scale deep pits on the surface, while Cl--free electrolytes (such as H2SO4 and NaNO3 solutions) formed oxide or passivation films on the surface, limiting material corrosion. - Considering both electrochemical characteristics and machining effects, 1 M NaNO3 solution was deemed the most suitable electrolyte for Jet Electrochemical Machining of amorphous alloys. - Using optimized parameters (e.g., 1 M NaNO3 solution), micro-pit structures with mirror-like surfaces were successfully manufactured, demonstrating the potential of Jet Electrochemical Machining in producing high-precision amorphous alloy microstructures. ### Conclusion The paper experimentally demonstrates that Jet Electrochemical Machining (Jet-ECM) is a promising micro-manufacturing method for amorphous alloys. Particularly, when using 1 M NaNO3 solution as the electrolyte, it can effectively and precisely manufacture amorphous alloy microstructures with high dimensional accuracy and geometric consistency. This work provides a new perspective and technical solution for the micro-manufacturing of amorphous alloys.

Microfabricating Mirror-like Surface Precision Micro-Sized Amorphous Alloy Structures Using Jet-ECM Process

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