Abstract:Through-mask electrodeposition (TM-ECD) is a widely-used technique for manufacturing mesoscale and microscale precision metal features and components in a mass-production manner. However, in most cases, the traditional TM-ECD processes are very hard to fabricate high-accuracy multiscale (macroscale, mesoscale, microscale) features simultaneously due to the inherent nonuniform distribution of the applied energy fields including electric field, mass transportation field, and temperature field during electrodeposition. Furthermore, nanocrystalline microstructures have not been realized by TM-ECD without additional nonmetallic additives or mechanical stirring. Here, a ultrafine anode scanning through-mask electrodeposition (UASTM-ECD) process operated at DC mode is developed to further trigger the formation of nanocrystalline without additives, in which a ultrafine wire-shaped inert anode embedded in a stirring paddle reciprocates over the top surfaces of the through-masks with a spacing of less than 100 μm. Experimental investigations into this unique TM-ECD were systemically carried out by examining the geometrical profile, surface morphologies, forming accuracy, grain size, and mechanical properties of the fabricated nanocrystalline structures and components. Our findings showed that the UASTM-ECD can facilitate to achieve a significantly improved thickness distribution uniformity and considerably fine nanocrystalline ultrapure microscale and mesoscale complex cross-sectional arrays components over the traditional TM-ECD processes even though the multiscale features and components are simultaneously deposited on the same substrate. These result from the unique deposition manner of the UASTM-ECD in which the metal materials are intermittently filled into the patterned photoresist cavity molds very locally and at the extremely high current densities. This versatile approach eliminates the possible contamination by additives and integration difficulty of mechanical stirring, which can be used to fabricate the multiscale ultrahigh strength and high accuracy ultrapure nanostructured-material features.

Effect of the mask geometry on the microstructure forming in through-mask electrochemical micromachining

Stress-Etching Using Laser Electrochemical Micromachining with Masks

Study of Mass Transfer Enhancement of Electrolyte Flow Field by Rotating Cathode in Through-Mask Electrochemical Micromachining

Etching uniformity study of mask electrolyte jet machining based on mass transfer coefficient: 3D simulation and experimental validation

Numerical simulation and experimental research on through-mask electrochemical machining of micro-dimple arrays using inner-jet cathodes

Chemical Etching Processes at the Dynamic GaAs/Electrolyte Interface in the Electrochemical Direct-Writing Micromachining

Hard Particle Mask Electrochemical Machining of Micro-Textures

Machining of Metal Microcone Arrays Based on Through-Mask Electrochemical Micromachining with Circumferential Equivalent Etching

Investigation on the electrochemical machining of micro groove using masked porous cathode

A Profile Shaping and Surface Finishing Process of Micro Electrochemical Machining for Microstructures on Microfluidic Chip Molds

Jet Electroforming of High-Aspect-Ratio Microcomponents by Periodically Lifting a Necked-Entrance Through-Mask

Additive manufacturing multiscale ultrahigh strength and high accuracy nanocrystalline nickel stuructures and components using ultrafine anode scanning through-mask electrodeposition

Simulation Analysis and Process Evaluation of Cooling Hole Forming Precision in Mask Assisted Electrochemical Machining Based on GH4169

Geometrical Modeling for Mask Refinement of Surface Micromachined MEMS Devices

Optimization of Nozzle Inclination and Process Parameters in Air-Shielding Electrochemical Micromachining

CMOS-Compatible Electrochemical Nanoimprint:High Throughput Fabrication of Ordered Microstructures on Semiconductor Wafer by Using a Glassy Carbon Mold

Multiphysics Research on Electrochemical Machining of Micro Holes with Internal Features

The coupling effect of slow-rate mechanical motion on the confined etching process in electrochemical mechanical micromachining

Anodic Dissolution Characteristics of GH4169 Alloy in NaNO3 Solutions by Roll-Print Mask Electrochemical Machining Using the Linear Cathode

Electrochemical micro-machining of high aspect ratio micro-tools with a reverse conical shape tip using electrolyte liquid membrane

Experimental study on the evolution process of Zr702 microdimple array generated with masked jet electrochemical machining