Polycrystalline-Silicon CMOS Thin-Film Transistors With T-Shaped Gate and Lightly Doped Drain

Cheng-Kuei Lee,Hsun-Lin Chang,Kun-Mung Chen,Guo-Wei Huang,Chien-Nan Kuo,Pei-Wen Li,Horng-Chih Lin
DOI: https://doi.org/10.1109/ted.2024.3433833
IF: 3.1
2024-08-28
IEEE Transactions on Electron Devices
Abstract:We report the implementation of both n- and p-channel polycrystalline-silicon (poly-Si) thin-film transistors (TFTs) with features of T-shaped gate (T-gate) of n+ poly-Si in combination with lightly doped drain (LDD) structure. The inclusion of the T-gate and LDD structures improves both the on-state current ( ) and off-state leakage ( ) of n-channel TFTs significantly in comparison to the conventional TFTs. For p-channel poly-Si TFTs, the LDD structure mitigates but leads to an degradation due to a potential barrier at the source junction underneath the T-gate's wing. An additional boron channel doping not only improves but also adjusts the threshold voltage of p-channel TFTs. Based on our proposed poly-Si TFTs, the fabricated T-gate devices demonstrate full-swing switching of CMOS inverters.
engineering, electrical & electronic,physics, applied
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