Ultraviolet Response in Coplanar Silicon Avalanche Photodiodes with CMOS Compatibility

Qiaoli Liu,Li Xu,Yuxin Jin,Shifeng Zhang,Yitong Wang,Anqi Hu,Xia Guo
DOI: https://doi.org/10.3390/s22103873
IF: 3.9
2022-05-20
Sensors
Abstract:Highly sensitive ultraviolet (UV) photodetectors are highly desired for industrial and scientific applications. However, the responsivity of silicon photodiodes in the UV wavelength band is relatively low due to high-density Si/SiO2 interface states. In this paper, a coplanar avalanche photodiode (APD) was developed with a virtual guard ring design. When working in Geiger mode, it exhibited a strong UV response. The responsivity of 4 × 103 A/W (corresponding to a gain of 8 × 106) at 261 nm is measured under the incident power of 0.6 μW with an excess bias of 1.5 V. To the best of our knowledge, the maximum 3-dB bandwidth of 1.4 GHz is the first report ever for a Si APD when working in the Geiger mode in spite of the absence of an integrated CMOS read-out circuit.
engineering, electrical & electronic,chemistry, analytical,instruments & instrumentation
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