A Near-Infrared CMOS Silicon Avalanche Photodetector with Ultra-Low Temperature Coefficient of Breakdown Voltage

Daoqun Liu,Tingting Li,Bo Tang,Peng Zhang,Wenwu Wang,Manwen Liu,Zhihua Li
DOI: https://doi.org/10.3390/mi13010047
IF: 3.4
2021-12-29
Micromachines
Abstract:Silicon avalanche photodetector (APD) plays a very important role in near-infrared light detection due to its linear controllable gain and attractive manufacturing cost. In this paper, a silicon APD with punch-through structure is designed and fabricated by standard 0.5 μm complementary metal oxide semiconductor (CMOS) technology. The proposed structure eliminates the requirements for wafer-thinning and the double-side metallization process by most commercial Si APD products. The fabricated device shows very low level dark current of several tens Picoamperes and ultra-high multiplication gain of ~4600 at near-infrared wavelength. The ultra-low extracted temperature coefficient of the breakdown voltage is 0.077 V/K. The high performance provides a promising solution for near-infrared weak light detection.
chemistry, analytical,nanoscience & nanotechnology,instruments & instrumentation,physics, applied
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