Silicon-coated carbon particle composite material and preparation method and equipment and application

李伟,岳敏,夏雨,任建国
2015-08-13
Abstract:The invention relates to a silicon-coated carbon particle composite material, a preparation method, preparation equipment and an application. Nanometer silicon is prepared by reaction and decomposition of low-temperature plasmas; a product can be prepared by chemical vapor deposition under an ambient temperature condition to prepare a carbon particle coated with an amorphous silicon layer; the size of the nanometer silicon particle can be further effectively regulated and controlled through adjustment of reaction air flow and reaction power; the size can be freely controlled within the range of 5-1,000nm; and a chemical vapor deposition chamber is designed into a rotating mode, so that the compound uniformity of the nanometer silicon and a base can be effectively improved; and furthermore, a silicon layer with a controllable thickness can be obtained by controlling the conditions such as the chemical vapor deposition rate, the rotation rate and the like.
Engineering,Materials Science
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