Abstract:MEMS resonant sensing devices require both high frequency (f) and low dissipation or high quality factor (Q) to ensure high sensitivity and high speed. In this study, we investigated the resonance properties and energy loss in the first three resonance modes, resulting in a significant increase in f‧Q product at higher orders. The third order resonance exhibits an approximately 15-fold increase in f‧Q product, while the Q factor remains nearly constant. Consequently, we achieved an ultrahigh f‧Q product exceeding 1012 Hz by higher-order resonances in single-crystal diamond cantilevers.

Higher-order resonance of single-crystal diamond cantilever sensors toward high f‧Q products