Abstract:Mechanical resonators are widely used in sensors, transducers and optomechanical systems, where mechanical dissipation sets the ultimate limit to performance. Over the past 15 years, the quality factors in strained mechanical resonators have increased by four orders of magnitude, surpassing the previous state of the art achieved in bulk crystalline resonators at room temperature and liquid helium temperatures. In this Review, we describe how these advances were made by leveraging 'dissipation dilution'—where dissipation is reduced through a combination of static tensile strain and geometric nonlinearity in dynamic strain. We then review the state of the art in strained nanomechanical resonators and discuss the potential for even higher quality factors in crystalline materials. Finally, we detail current and future applications of dissipation-diluted mechanical resonators.
What problem does this paper attempt to address?
### The problems the paper attempts to solve
This paper aims to explore how to significantly improve the quality factor ($Q$) of micro - and nano - mechanical resonators through "dissipation dilution" technology. Specifically, the paper reviews the methods of reducing mechanical dissipation through the combination of static tensile strain and geometrically nonlinear dynamic strain in the past 15 years, thus achieving a huge improvement in the quality factor. These methods make the quality factor of mechanical resonators exceed the best levels previously achievable for bulk - crystal resonators at room temperature and liquid - helium temperature.
### Key problems and challenges
1. **Limitations of mechanical dissipation**: The performance of mechanical resonators in sensors, transducers, and optomechanical systems is limited by mechanical dissipation. Traditional materials have high inherent mechanical losses at low temperatures due to the existence of two - level systems, which limits the improvement of the quality factor.
2. **Requirement for high Q values**: In many applications, such as quantum optomechanical experiments, force sensing, acceleration sensing, and radiometry, a very high quality factor is required to exceed the limits of thermal noise and enter the field of quantum mechanics.
3. **Limitations of material selection**: For example, silicon nitride ($Si₃N₄$) is not an ideal material for high - Q mechanical resonators (because it is an amorphous material and has high inherent mechanical losses at low temperatures), but it has become a key research material because high - strain thin films can be prepared by low - pressure chemical vapor deposition (LPCVD) technology.
4. **Design optimization**: How to further improve the quality factor through geometric design (such as soft clamping, strain engineering, layered structures, etc.) and reduce the bending energy loss at the boundaries.
### Solutions
The paper details specific methods for achieving high Q values through "dissipation dilution" technology:
- **Static tensile strain**: By applying static tensile strain, most of the elastic energy in the material is stored in geometrically nonlinear deformations during vibration, rather than in linear bending deformations, thereby reducing mechanical dissipation.
- **Geometric nonlinearity**: Geometric nonlinearity refers to the strain - tensor components of the amplitude - squared term, and this nonlinear deformation does not cause mechanical losses in the first - order approximation.
- **Advanced design and manufacturing**: Utilize nanofabrication technology to prepare resonators with a large length - to - thickness ratio, and further optimize the quality factor by combining designs such as soft clamping, strain engineering, and layered structures.
### Application prospects
High - Q mechanical resonators have broad application prospects in multiple fields, including but not limited to:
- **Quantum optomechanics**: Used to conduct experiments such as quantum sideband asymmetry, optomechanical squeezing, and sideband cooling.
- **Force and acceleration sensing**: Capable of achieving extremely low - noise force and acceleration measurements.
- **Dark matter detection**: As a potential resonant dark matter detector.
- **Hybrid atom - mechanical systems**: Used to achieve microwave - to - optical signal conversion and read superconducting qubits.
In summary, by reviewing and summarizing the development history of "dissipation dilution" technology, this paper shows how to significantly improve the quality factor of micro - and nano - mechanical resonators through innovative design and technical means, and explores its great potential in future scientific research and practical applications.