Abstract:We report actuation and detection of gigahertz-range resonance frequencies in nano-crystalline diamond mechanical resonators. High order transverse vibration modes are measured in coupled-beam resonators exhibiting frequencies up to 1.441 GHz. The cantilever-array design of the resonators translates the gigahertz-range resonant motion of micron-long cantilever elements to the displacement of the central supporting structure. Use of nano-crystalline diamond further increases the frequency compared to single crystal silicon by a factor of three. High clamping losses usually associated with micron-sized straight beams are suppressed in the periodic geometry of our resonators, allowing for high quality factors exceeding 20,000 above 500 MHz.

What problem does this paper attempt to address?

The main problem that this paper attempts to solve is to achieve high mechanical resonance frequencies and high - quality factors of nano - mechanical resonators in the gigahertz (GHz) frequency range. Specifically, by combining the excellent mechanical properties of nanocrystalline diamond and the unique resonator architecture of coupling elements, the author has demonstrated nano - mechanical resonators that can operate in the GHz range, and these resonators have very high quality factors (Q - values), exceeding 20,000. ### Problem Background Traditional micro - electro - mechanical systems (MEMS) and nano - electro - mechanical systems (NEMS) resonators usually encounter some challenges in the GHz frequency range, such as: - **High clamping losses**: Resulting in a decrease in the quality factor. - **Material limitations**: Commonly used materials such as single - crystal silicon do not perform as well as diamond at high frequencies. ### Solution To solve these problems, the author has adopted the following strategies: 1. **Using nanocrystalline diamond**: Nanocrystalline diamond has an extremely high Young's modulus (\( E \approx 900 \, \text{GPa} \) ), making its sound speed and frequency approximately three times higher than that of single - crystal silicon. 2. **Unique resonator geometry**: A double - ended fixed beam structure with a short cantilever array has been designed, and this structure can enhance the response of certain high - order resonance modes, thereby improving the overall performance. 3. **Suppressing clamping losses**: High clamping losses associated with micron - scale straight beams have been suppressed through a periodic geometric structure. ### Application Prospects Achieving high mechanical resonance frequencies and high - quality factors in the GHz range is of great significance for multiple fields, including but not limited to: - **Frequency - selective oscillators and passive filters in microwave communications** - **High - speed mechanical storage elements** - **Ultra - sensitive mass or charge detectors** - **Low - temperature quantum - effect research** Through these improvements, the author has demonstrated the excellent performance of nano - mechanical resonators in the GHz frequency range, laying the foundation for further research and technological applications.

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