Abstract:Energy dissipation through support structures is one of the dominant loss mechanisms in MEMS resonators, which results in a very low quality ( Q ) factor. This paper aims to propose a one-dimensional phononic crystal (PnC) structure, namely a compound leaf-shaped phononic crystal (PnC) strip (TYPE_PROP), as anchor tethers to boost the anchor quality factor ( ) of a thin-film aluminium nitride (AlN)-on-silicon (Si) MEMS resonator. Thus, its Q can achieve a superior value. The operating frequency and mode of the resonator are 123.49 MHz and a length extensional (LE) mode, respectively. This frequency falls into the band gap frequency range of 52 MHz of the TYPE_PROP. The of the resonator with unit cell number variation of the TYPE_PROP tether is studied. From these investigations, the effectiveness of the tether in reducing/eliminating the anchor energy loss is evaluated. Furthermore, this is also compared to the same resonator structure with two conventional tether types. Additionally, the variation of the band gaps' properties versus the dimensional parameters of the TYPE_PROP are also evaluated. The COMSOL Multiphysics platform based numerical results demonstrate that the of the resonator with the TYPE_PROP based tethers achieves superior values compared to its counterparts. Specifically, this value is about 5.42 and 23.74 times higher than that of the TYPE_CON1 and TYPE_CON2, respectively. The improvement of the LE mode MEMS resonator using the TYPE_PROP achieves higher values than that using two conventional tether configurations.

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