Abstract:The nucleation and structure of silicon nanocrystals formed by different preparation conditions and silicon concentration (28 - 70 area %) have been studied using Transmission Electron Microscopy (TEM), Energy Filtered TEM (EFTEM) and Secondary Ion Mass Spectroscopy (SIMS). The nanocrystals were formed after heat treatment at high temperature of a sputtered 10 nm thick silicon rich oxide on 3 nm SiO$_2$ layer made by Rapid Thermal Oxidation (RTO) of silicon. Nanocrystals precipitate when the excess silicon concentration exceeds 50 area %. Below this percentage amorphous silicon nanoclusters were found. In-situ heat treatment of the samples in the TEM showed that the crystallization requires a temperature above 800$^o$C. The nanocrystals precipitate in a 4 nm band, 5 nm from the Si substrate and 4 nm from the SiO$_2$ sample surface. The silicon nucleates where the excess Si concentration is the highest. The top surface has less excess Si due to reaction with oxygen from the ambient during annealing. The SiO$_2$-RTO layer is more Si rich due to Si diffusion from the SiO$_2$-Si layer into RTO. Twinning and stacking faults were found in nanocrystals with 4-10 nm in diameter. These types of defects may have large effects upon the usability of the material in electronic devices. Both single and double twin boundaries have been found in the nanocrystals by high resolution transmission electron microscopy (HRTEM). Image simulations were carried out in order to obtain more information about the defects and nanocrystals. The stacking faults are extrinsic and located in the twin boundaries.

Understanding the Formation Mechanisms of Silicon Particles from the Thermal Disproportionation of Hydrogen Silsesquioxane

Fabrication and Characterisation of Silicon Quantum Dots in SiO 2 /si 3 N 4 Hybrid Matrix

Formation Mechanism of Monodispersed Polysilsesquioxane Spheres in One-Step Sol-Gel Method

Characterization of the Interface Region During the Agglomeration of Silicon Nanocrystals in Silicon Dioxide

Sintering Effect on Crystallite Size, Hydrogen Bond Structure and Morphology of the Silane-Derived Silicon Powders

Characterization of amorphous and crystalline silicon nanoclusters in ultra thin silica layers

Growth of Zirconium Silicide Nanostructures on Vicinal and Flat Si(111)-7 × 7 Surfaces

Triethoxysilane-derived Silicon Quantum Dots: A Novel Pathway to Small Size and High Crystallinity

A parametric study of non-thermal plasma synthesis of silicon nanoparticles from a chlorinated precursor

From silicon to silica: a green chemistry approach for hollow sphere nanoparticle formation

Formation and Thermal Stability of Gold-Silica Nanohybrids: Insight into the Mechanism and Morphology by Electron Tomography

Manipulation Of Phase And Microstructure At Nanoscale For Sic In Molten Salt Synthesis

Formation of Micrometer-Sized Textured Hexagonal Silicon Crystals via Nanoindentation

Mechanistic Investigation of the Formation of Nickel Nanocrystallites Embedded in Amorphous Silicon Nitride Nanocomposites

Silicide formation by solid-state diffusion in MO/Si multilayer thin films

Formation mechanism of a silicon-on-nothing structure using the level-set approach and molecular dynamics

Crystallized Silicon Nanostructures - Experimental Characterization and Atomistic Simulations

Nucleation of silicon nanoparticles in amorphous silicon dioxide matrices

Fabrication and Characterization of Silicon Quantum Dots in Si-rich Silicon Carbide Films.

Elucidation of microstructure of single-phase microcrystalline silicon based on crystallite size distributions

Hydrogen Bubbles and Formation of Nanoporous Silicon During Electrochemical Etching