Simulation of Copper Nanostructure Formation on Silicon Dioxide Microsubstrate Surface

I. I. Fairushin,A. Yu. Shemakhin
DOI: https://doi.org/10.1134/S001814392307010X
2023-09-10
High Energy Chemistry
Abstract:The process of copper nanostructure formation on a silicon dioxide substrate was simulated using the molecular dynamics method. The process parameters corresponded to the conditions in a low-pressure gas-discharge plasma. The relationship between the nanostructure formation rate and the main plasma parameters was determined.
chemistry, physical
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