Abstract:High efficiency thin-film silicon (Si) solar cells were prepared on flexible substrates by the plasma-enhanced chemical vapor deposition method. To improve their performance, the microstructural, electrical, and optical properties of the core component layers including the metal rear reflectors, p- and n-type doped layers, and intrinsic absorber layers were controlled sophistically. To enable the use of flexible substrates with low heat resistance as well as to enhance light-scattering properties, nanotextured rear reflectors with a Ag/Al:Si bilayer structure were developed by dc magnetron sputtering at a low substrate temperature of below 150 degrees C. Highly crystalline n-doped seed layers (which effectively eliminate a defect-dense amorphous region formed in the initial growth stage of intrinsic nanocrystalline silicon (nc-Si:H) absorber layers) and p-type wide-bandgap nanocrystalline silicon carbide (nc-SiC:H) window layers (which reduce the parasitic absorption loss in the short wavelength region and increase the open circuit voltage (Voc)) were successfully applied to enhance the performance characteristics of the solar cells. Through the combination of the developed core component layers, high conversion efficiencies of 8.84% (V-oc = 0.53 V, J(sc) = 25.28 mA/cm(2), and fill factor (FF) = 0.66, where J(sc) is the short circuit current) and 7.48% (V-oc = 0.50 V, J(sc) = 21.07 mA/cm(2), and FF = 0.71) were obtained for nc-Si:H solar cells fabricated on stainless steel (SUS) and polyimide substrates, respectively, at a low substrate temperature of below 150 degrees C. Flexible a-Si:H/nc-Si:H double-junction solar cells fabricated on SUS substrates showed a high conversion efficiency of 11.46% (V-oc = 1.38 V, J(sc) = 11.53 mA/cm(2), and FF = 032) when the nc-Si:H solar cells developed in this study were applied as a bottom cell.

Continuously deposited anti-reflection double layer of silicon nitride and silicon oxynitride for selective emitter solar cells by PECVD

Double layer antireflection coating for high-efficiency passivated emitter silicon solar cells

Fabrication of Double Antireflection Layer of SiO 2 /SiN x via Spin Coating and Brush Painting for Enhanced Performance of Silicon Solar Cells

PROPERTIES OF PECVD SiNx FILM FOR SOLAR CELLS

Application of dual-layer polysilicon deposited by PECVD in n -type TOPCon solar cells

Performance investigation of silicon nitride (SiNx) layer doped with twin thin films of gallium and zinc oxide for solar cell

Characterization of nanoporous silicon layer to reduce the optical losses of crystalline silicon solar cells

Performance Enhancement of Thin-Film Silicon Solar Cells by Development of Core Component Layers

Performance of Large Area n-TOPCon Solar Cells with Selective Poly-Si Based Passivating Contacts Prepared by PECVD Method

A Study on the Application of Thin Film Passivation and Crystalline Silicon Solar Cells Using PECVD Process

Towards the implementation of a p-nc-SiOx:H/p-SiC:H double window layer for high efficiency, roll-to-roll processed flexible thin film silicon solar modules

Linked Nickel Oxide/Perovskite Interface Passivation for High‐Performance Textured Monolithic Tandem Solar Cells

Improvements in anti-reflection coatings for high-efficiency silicon solar cells

Design of a High Efficiency p-Si Based Heterojunction Solar Cell with ln2S3 Window and NiO BSF Layers

Impact of PECVD SiON stoichiometry and post-annealing on the silicon surface passivation

Optimal Design of Quadruple-Layer Antireflection Coating Structure for Conversion Efficiency Enhancement in Crystalline Silicon Solar Cells

Improved Al 2 O 3 / SiN x and SiO 2 / SiN x stack passivation layer structure PERC sc‐silicon solar cells on mass production line

Two-Dimensional Nanostructure Anti-Reflection Enhancing Performance Silicon Solar Cells

SiOx/polysilicon selective emitter prepared by PECVD-deposited amorphous silicon plus one-step firing enabling excellent J0,met of < 235 fA/cm2 and ρc of < 2 mΩ·cm2

Efficiency improvement of silicon nanostructure-based solar cells

An Extended Approach on Power Conversion Efficiency Enhancement Through Deposition of ZnS-Al2S3 Blends on Silicon Solar Cells