Ferroelectricity and pseudo-coherent growth in HfO2/SrHfO3 nanolaminates

Hiroyuki Yamada,Yoshikiyo Toyosaki,Akihito Sawa
DOI: https://doi.org/10.1063/5.0135277
IF: 2.877
2023-03-08
Journal of Applied Physics
Abstract:Ferroelectricity in thin films of HfO 2 has been the subject of extensive studies in materials science as well as device applications. The emergence of ferroelectricity is attributable to the orthorhombic phase ( Pca 2 1 ) of HfO 2 , stabilized in the films by metal-element doping, strains from substrates and electrode films, and oxygen deficiency. Recently, ferroelectricity has been reported in nanolaminates of HfO 2 with other oxides such as ZrO 2 and Al 2 O 3 , implying that nanolaminates are another effective way to bring about ferroelectricity in HfO 2 . However, the mechanism of orthorhombic phase stabilization in nanolaminates is not fully understood. In this study, we demonstrated that ferroelectricity emerges in nanolaminates consisting of undoped HfO 2 and perovskite SrHfO 3 deposited on Sn-doped In 2 O 3 bottom electrodes, when the thickness of HfO 2 layers was ≥6 nm. For nanolaminates in which the thickness of the HfO 2 layers was ≤5 nm, ferroelectricity was remarkably suppressed due to Sr-incorporation into the HfO 2 layers at the interface. In those nanolaminates, the crystal orientations of HfO 2 grains were well aligned throughout the HfO 2 layers, indicating that the HfO 2 layers grew in a pseudo-coherent manner. This study aids to understand the stabilization of the ferroelectric orthorhombic phase in nanolaminates in terms of their structural properties.
physics, applied
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