Structure Optimization of Planar Nanoscale Vacuum Channel Transistor

Ji Xu,Congyuan Lin,Yu Li,Xueliang Zhao,Yongjiao Shi,Xiaobing Zhang
DOI: https://doi.org/10.3390/mi14020488
IF: 3.4
2023-02-20
Micromachines
Abstract:Due to its unique structure, discoveries in nanoscale vacuum channel transistors (NVCTs) have demonstrated novel vacuum nanoelectronics. In this paper, the structural parameters of planar-type NVCTs were simulated, which illustrated the influence of emitter tip morphology on emission performance. Based on simulations, we successfully fabricated back-gate and side-gate NVCTs, respectively. Furthermore, the electric properties of NVCTs were investigated, showing the potential to realize the high integration of vacuum transistors.
chemistry, analytical,nanoscience & nanotechnology,instruments & instrumentation,physics, applied
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