Abstract:Molybdenum (Mo), which is one among the refractory metals, is a promising material with a wide variety of technological applications in microelectronics, optoelectronics, and energy conversion and storage. However, understanding the structure–property correlation and optimization at the nanoscale dimension is quite important to meet the requirements of the emerging nanoelectronics and nanophotonics. In this context, we focused our efforts to derive a comprehensive understanding of the nanoscale structure, phase, and electronic properties of nanocrystalline Mo films with variable microstructure and grain size. Molybdenum films were deposited under varying temperature (25–500 °C), which resulted in Mo films with variable grain size of 9–22 nm. The grazing incidence X-ray diffraction analyses indicate the (110) preferred growth behavior the Mo films, though there is a marked decrease in hardness and elastic modulus values. In particular, there is a sizable difference in maximum and minimum elastic modulus values; the elastic modulus decreased from ~460 to 260–280 GPa with increasing substrate temperature from 25–500 °C. The plasticity index and wear resistance index values show a dramatic change with substrate temperature and grain size. Additionally, the optical properties of the nanocrystalline Mo films evaluated by spectroscopic ellipsometry indicate a marked dependence on the growth temperature and grain size. This dependence on grain size variation was particularly notable for the refractive index where Mo films with lower grain size fell in a range between ~2.75–3.75 across the measured wavelength as opposed to the range of 1.5–2.5 for samples deposited at temperatures of 400–500 °C, where the grain size is relatively higher. The conductive atomic force microscopy (AFM) studies indicate a direct correlation with grain size variation and grain versus grain boundary conduction; the trend noted was improved electrical conductivity of the Mo films in correlation with increasing grain size. The combined ellipsometry and conductive AFM studies allowed us to optimize the structure–property correlation in nanocrystalline Mo films for application in electronics and optoelectronics.

Microstructure and residual stress dependence of molybdenum films on DC magnetron sputtering conditions

Residual strain and electrical resistivity dependence of molybdenum films on DC plasma magnetron sputtering conditions

Effect of Deposition Pressure on Microstructure and Tribological Behavior of MoS X /mos X -Mo Nanoscale Multi-Layer Films

Molybdenum Thin Films with Low Resistivity and Superior Adhesion Deposited by Radio-Frequency Magnetron Sputtering at Elevated Temperature

Effect of film thickness on the structural and tribo-mechanical properties of reactive sputtered molybdenum nitride thin films

Influence of deposition pressure on the microstructure and mechanical properties of sputter-deposited MoNbTaW refractory multi-principal element alloy thin films

Preparation and Influencing Factors of Molybdenum Targets and Magnetron-Sputter-Deposited Molybdenum Thin Films

Comparative Study of the Tribology of Amorphous Carbon Films Via Magnetron Sputtering Depending on the Different Magnetic Field

The Effect of Microstructure of Molybdenum Target

Influence of Mo target microstructure on the morphology and properties of sputtered films

Characterizing the Stress and Electrical Properties of Superconducting Molybdenum Films

Effect of Molybdenum Concentration and Deposition Temperature on the Structure and Tribological Properties of the Diamond-like Carbon Films

Preparation and Characterization of Molybdenum Thin Films by Direct-Current Magnetron Sputtering

Deposition of Molybdenum Thin Films on Flexible Polymer Substrates by Radio Frequency Magnetron Sputtering

The Microstructure and Cracking Behaviors of Pure Molybdenum Fabricated by Selective Laser Melting

Structural, Optical and Mechanical Properties of Nanocrystalline Molybdenum Thin Films Deposited under Variable Substrate Temperature

Sputter-Deposited Mo Thin Films: Multimodal Characterization of Structure, Surface Morphology, Density, Residual Stress, Electrical Resistivity, and Mechanical Response

Native surface oxidation phenomena of DC-Sputtered molybdenum thin film in tropical environment

Size effect on mechanical properties and deformation mechanisms of highly textured nanocrystalline Mo thin films

Effect of sputtering power and substrate bias on microstructure, mechanical properties and corrosion behavior of CoCrFeMnNi high entropy alloy thin films deposited by magnetron sputtering method

Electro-Mechanical Properties of Molybdenum Thin Film On Polyethylene Terephthalate Subjected to Tensile Stress