Preparation and tribological behavior of MoSx/MoSx-Mo nanoscale multilayer films in different environments

郑晓华,居易,沈霞,王运,涂江平,何丹农
2006-01-01
Abstract:MoSx/MoSx-Mo nanoscale multilayer films were deposited on steel substrate alternately by D. C. magnetron sputtering at different deposition pressures. The adhesion to steel substrate was tested by scratch tester. The morphology and microstructure of the multilayer films were characterized by SEM and XRD. The tribological properties were investigated using a ball-on-disk tribometer both in vacuum and in humid air. Results show that the adhesion of the nanoscale multilayer films to steel substrate is better than that of pure MoS2 film. With the increase of deposition pressure, the adhesion decreases and the (002) plane orientation of MoSx is weakened. The multilayer film deposited at 0.24 Pa shows the lowesi friction coefficient and wear rate both in vacuum and in humid air, and has excellent tribological performance.
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