USA WTC 2005-63588 TRIBOLOGICAL PROPERTIES OF MAGNETRON SPUTTERED M o S 2 / METAL ( T i , M o ) NANOCOMPOSITE COATINGS
Z. Z. Xia,J. P. Tu,D. M. Lai,L. L. Zhang,Q. Wang,L. M. Chen,D. N. He
2005-01-01
Abstract:The MoS2/metal (Ti, Mo) nanocomposite coatings were deposited on aluminum alloy substrate by magnetron sputtering. The morphology and microstructure of the coatings were characterized by X-ray diffraction (XRD), scanning electron microscopy (SEM). The tribological properties of MoS2/metal (Ti, Mo) nanocomposite coatings were investigated using a ball-on-disk tribometer in ambient air. The MoS2 /Ti nanocomposite coating showed lower friction coefficient and higher wear resistance as compared to the pure MoS2 coating, which were caused by the microstructure of the composite coating that serve as perfect intermediate lubricants between the contact faces. The effects of metal inclusion in the composite coatings were further discussed combined with the former reports. INTRODUCTION Solid lubricants have the advantages including long life, no contamination and usage in hash environments that liquid lubricant cannot be used. Magnetron sputtering and ion plating technology have been developed to deposit MoS2 coatings. When pure MoS2 coating is exposed to oxygen-rich atmosphere, however, tribological performance deterioration would occur due to the oxidization of MoS2. It has been found that co-sputtering MoS2 with metal resulted in better tribological properties than that without sputtering metal. In particular, coatings with Ti inclusion exhibit a stable friction coefficient and better endurance than pure MoS2 coatings in ambient condition. During sputtering and rubbing process Ti could prohibit the ingress of O2 from destroy the constituent and the structure of the coatings, at the same time TiO2 generated could be used as lubricating material, too. In this present work, MoS2/metal (Ti, Mo) coatings were deposited on aluminum alloy and silicon substrates by D.C. magnetron sputtering. The MoS2/metal ratio in the coatings was controlled by sputtering the composite targets. The tribological properties of the composite coatings were evaluated and the effects of Ti and Mo inclusion in the composite coatings on their tribological performance in ambient air were also discussed. 1. EXPERIMENTAL Pure titanium target (99.99%) and MoS2/metal composite targets (pure MoS2 mixed with Ti or Mo) with a diameter in 60 mm were used. The composite targets were fabricated by ball milling the mixture of pure MoS2 and metal powder, followed by pressing the mixture under a pressure of 60 MPa. In this work, three composite targets (target 1: pure MoS2; target 2: MoS2, 10 at.% Ti, 10 at.% Mo; target 3: MoS2, 20 at.% Ti) were used. Pre-sputtering was performed to clean the surface of the targets prior to the depositing process. The pure titanium target was firstly sputtered for obtaining an interlayer with a thickness of 50 nm, which could improve the coating adhesion. Afterward, the composite coatings with a thickness of 1 μm were obtained by sputtering the composite targets. The content of metal inclusion in the main bulk of the coatings was varied with using different composite targets. Tribological properties of the composite coatings were performed on a WTM-1E ball-on-disk tribometer. The wear tracks of the coatings were examined by means of SEM. 2. RESULTS AND DISCUSSION Fig.1 shows the XRD patterns of the deposited coatings on silicon substrate. From the XRD analysis, it can be concluded that the deposited coatings are composed of disordered structure. No peaks of crystalline phase are found from the pure MoS2 and MoS2 /(Ti, Mo) coating. In contrast to the pure MoS2 and MoS2 /(Ti, Mo) coatings, an apparent peak of Mo3S4 appears in pattern 3 for the MoS2 /Ti coating, which is in agreement with the result of addition of Ti to the coatings inhibiting the formation of crystalline MoS2. In this present work, the sufficient addition of Ti prohibited the crystalline of MoS2 and promoted the formation of Mo3S4. Relatively sputtering without the addition of metal was difficult to produce the crystalline MoS2. 1 Copyright © 2005 by ASME 10 20 30 40 50 60 70 80 Mo3S4 (122) 1 pure MoS2 2 MoS2/(Ti, Mo) 3 MoS2/Ti